Silvaco code:-
go atlas
mesh space.mult=1
#
x.mesh loc=0 spac=.05
x.mesh loc=.018 spac=.005
x.mesh loc=.020 spac=.0005
x.mesh loc=.021 spac=.0005
x.mesh loc=.022 spac=.0005
x.mesh loc=.026 spac=.0005
x.mesh loc=.027 spac=.0005
x.mesh loc=.028 spac=.005
x.mesh loc=.046 spac=.005
x.mesh loc=.048 spac=.05
#
y.mesh loc=0 spac=.005
y.mesh loc=.005 spac=.0005
y.mesh loc=.053 spac=.0005
y.mesh loc=.055 spac=.0005
y.mesh loc=.065 spac=.0005
y.mesh loc=.070 spac=.0005
y.mesh loc=.075 spac=.005
region num=1 material=silicon x.min=0 y.min=0
region num=2 material=silicon x.min=0 x.max=.02 y.min=.005 y.max=.055
region num=3 material=silicon x.min=.028 x.max=.048 y.min=.005 y.max=.055
region num=4 material=silicon x.min=0 x.max=.048 y.min=.055 y.max=.065
region num=5 material=silicon x.min=0 x.max=.048 y.min=.065 y.max=.070
region num=6 material=hfo2 x.min=.020 x.max=.028 y.max=.055
#
qtx.mesh loc=.015 spac=.0005
qtx.mesh loc=.02 spac=.0005
qtx.mesh loc=.040 spac=.0005
#
qty.mesh loc=0 spac=.0005
qty.mesh loc=.005 spac=.00005
qty.mesh loc=.020 spac=.0005
qty.mesh loc=.06 spac=.0005
#
electrode name=gate x.min=.022 x.max=.026 y.min=0 y.max=.053
electrode name=source1 x.min=0 x.max=.02 y.min=0 y.max=.005
electrode name=source2 x.min=.028 x.max=.048 y.min=0 y.max=.005
electrode name=drain x.min=0 x.max=.048 y.min=.07 y.max=.075
#
doping uniform conc=1e20 p.type reg=2
doping uniform conc=1e20 p.type reg=3
doping uniform conc=1e19 n.type reg=5
doping uniform conc=1e17 n.type reg=4
#
#
model bbt.nonlocal srh conmob bgn CVT fermi ni.fermi qtunn.dir=ydir print
#
contact name=gate workfun=4.6
contact name=source1
contact name=source2 common=source1
contact name=drain
#
#
output val.band con.band qfn qfp e.field j.electron j.hole j.conduction j.total ex.field ey.field e.mobility h.mobility qss e.temp h.temp j.disp
#
method newton autonr trap maxtrap=3
#
solve init
solve prev
solve vdrain=0
solve vdrain=.025
solve vdrain=.05
solve vdrain=.1
solve vdrain=.5
solve vdrain=1.0
log outf=vdstfet.log master
solve ac freq=1e6 vgate=0 vstep=.05 name=gate vfinal=1
save outf=vdstfet.str
tonyplot vdstfet.str
tonyplot vdstfet.log
quit
Result:-
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