single-active-layer TFT

silvaco code:-

go atlas

mesh width=100 outf=tft_IGZO.str

x.m l=0 s=1

x.m l=4 s=0.1

x.m l=26 s=0.1

x.m l=30 s=1

#=====================================

y.m l=0 s=0.002 

y.m l=0.03 s=0.0005 

y.m l=0.13 s=0.010

#=====================================

region num=1 material=igzo y.min=0.000 y.max=0.030

region num=2 material=sio2 y.min=0.030 y.max=0.130

#=====================================

elec num=1 name=gate bottom

elec num=2 name=source y.max=0.0 x.min=0.0 x.max=5

elec num=3 name=drain y.max=0.0 x.min=25 x.max=30

#=====================================

contact num=1 p.poly

contact num=2 workf=4.16

contact num=3 workf=4.16

#=====================================

material region=1 eg300=3.20 mun=15 affinity=4.16 permit=10 nc300=5e18 nv300=3e19

models fermi print

#=====================================

defects nta=1.21e20 ntd=1.55e20 wta=0.030 wtd=0.110 \

ngd=1e16 egd=2.95 wgd=0.1 \

nga=3.2e17 ega=2.0 wga=0.1 \

dfile=IGZO_bulk_don.dat afile=IGZO_bulk_acc.dat continuous numa=200 numd=200

#=====================================

intdefects intnumber=1/2 nta=0 ntd=0 wta=0 wtd=0 \

ngd=6.0e11 egd=2.95 wgd=0.1 nga=0 ega=0 wga=0 \

dfile=IGZO_int_don.dat afile=IGZO_int_acc.dat continuous numa=200 numd=200

#=====================================

output con.band val.band

probe name=my_fermi_front x=15 y=0.0298 QFN

probe name=my_con_front x=15 y=0.0298 CON.BAND

probe name=my_con_back x=15 y=0.0 CON.BAND

#=====================================

solve init 

save outf=tftIGZO_init.str

#=====================================

solve vdrain=0 vstep=0.1 vfinal=0.5 name=drain

save outf=tftIGZO_D05V.str

tonyplot tftIGZO_D05V.str

#=====================================

log outf=tftIGZO_neg.log

solve vgate=0 vstep=-0.1 vfinal=-5 name=gate

solve vstep=-0.2 vfinal=-10 name=gate

tonyplot tftIGZO_neg.log

#=====================================

save outf=tftIGZO_negG10V.str

log off

load inf=tftIGZO_D05V.str master

solve prev

log outf=tftIGZO_pos.log

solve vstep=0.1 vfinal=5 name=gate

solve vstep=0.2 vfinal=20 name=gate

tonyplot tftIGZO_neg.log

log off

quit

result:-