single-active-layer TFT

silvaco code:-

go atlas

mesh width=100 outf=tft_IGZO.str

x.m l=0 s=1

x.m l=4 s=0.1

x.m l=26 s=0.1

x.m l=30 s=1

#=====================================

y.m l=0 s=0.002 

y.m l=0.03 s=0.0005 

y.m l=0.13 s=0.010

#=====================================

region num=1 material=igzo y.min=0.000 y.max=0.030

region num=2 material=sio2 y.min=0.030 y.max=0.130

#=====================================

elec num=1 name=gate bottom

elec num=2 name=source y.max=0.0 x.min=0.0 x.max=5

elec num=3 name=drain y.max=0.0 x.min=25 x.max=30

#=====================================

contact num=1 p.poly

contact num=2 workf=4.16

contact num=3 workf=4.16

#=====================================

material region=1 eg300=3.20 mun=15 affinity=4.16 permit=10 nc300=5e18 nv300=3e19

models fermi print

#=====================================

defects nta=1.21e20 ntd=1.55e20 wta=0.030 wtd=0.110 \

ngd=1e16 egd=2.95 wgd=0.1 \

nga=3.2e17 ega=2.0 wga=0.1 \

dfile=IGZO_bulk_don.dat afile=IGZO_bulk_acc.dat continuous numa=200 numd=200

#=====================================

intdefects intnumber=1/2 nta=0 ntd=0 wta=0 wtd=0 \

ngd=6.0e11 egd=2.95 wgd=0.1 nga=0 ega=0 wga=0 \

dfile=IGZO_int_don.dat afile=IGZO_int_acc.dat continuous numa=200 numd=200

#=====================================

output con.band val.band

probe name=my_fermi_front x=15 y=0.0298 QFN

probe name=my_con_front x=15 y=0.0298 CON.BAND

probe name=my_con_back x=15 y=0.0 CON.BAND

#=====================================

solve init 

save outf=tftIGZO_init.str

#=====================================

solve vdrain=0 vstep=0.1 vfinal=0.5 name=drain

save outf=tftIGZO_D05V.str

tonyplot tftIGZO_D05V.str

#=====================================

log outf=tftIGZO_neg.log

solve vgate=0 vstep=-0.1 vfinal=-5 name=gate

solve vstep=-0.2 vfinal=-10 name=gate

tonyplot tftIGZO_neg.log

#=====================================

save outf=tftIGZO_negG10V.str

log off

load inf=tftIGZO_D05V.str master

solve prev

log outf=tftIGZO_pos.log

solve vstep=0.1 vfinal=5 name=gate

solve vstep=0.2 vfinal=20 name=gate

tonyplot tftIGZO_neg.log

log off

quit

result:-

BIO TFT

go atlas 

mesh width=100 outf=tft_BIO.str 

x.m l=0 s=1

x.m l=4 s=0.1

x.m l=26 s=0.1

x.m l=30 s=1

#======================================

y.m l=0 s=0.01

y.m l=0.05 s=0.01

y.m l=0.15 s=0.50

#======================================

region num=1 material=igzo y.min=0 y.max=0.05

region num=2 material=sio2 y.min=0.05 y.max=0.15

#====================== 

===========

elec num=1 name=gate bottom

elec num=2 name=source y.max=0.0 x.min=0.0 x.max=5

elec num=3 name=drain y.max=0.0 x.min=25 x.max=30

#======================================

contact num=1 p.poly

contact num=2 workf=4.16

contact num=3 workf=4.16

#======================================

material material=igzo eg300=3.2 mun=12 

models fermi print

#======================================

defects nta=4e20 ntd=1.55e20 wta=0.057 wtd=0.110 \

ngd=4e18 egd=3.00 wgd=0.14 \

nga=5.57e18 ega=2.0 wga=0.14 \

sigtae=1e-15 sigtah=1e-15 sigtde=1e-15 sigtdh=1e-15 \

siggae=1e-15 siggah=1e-15 siggde=1e-15 siggdh=1e-15 \

dfile=BIO_don.dat afile=BIO_acc.dat continuous numa=200 numd=200

#======================================

solve init

solve vdrain=0.1

save outf=tft_BIO_D01V.str

tonyplot tft_BIO_D01V.str

#======================================

log outf=tft_BIO_neg.log

solve vgate=0 vstep=-.5 vfinal=-10 name=gate

log off

load inf=tft_BIO_D01V.str master

solve prev

log outf=tft_BIO_pos.log

solve vstep=1 vfinal=30 name=gate

log off

#======================================

tonyplot tft_BIO_neg.log -overlay tft_BIO_pos.log

quit

result:- 

high-k gate dielectric MISFET

 silvaco tcad:

go atlas

#

mesh auto

x.m l=0.00 s=0.1

x.m l=0.8 s=0.05

x.m l=1.3 s=0.1

x.m l=1.8 s=0.05

x.m l=2.6 s=0.1

#

y.m l=-0.004888 s=0.001

y.m l=0.0 s=0.001

y.m l=0.1 s=0.025

y.m l=1 s=0.2

#

region num=1 y.min=0 y.max=1 silicon

region num=2 y.max=0 material=HfO2

electrode name=gate x.min=0.6 x.max=2.0 y.max=-0.004888

electrode name=source x.max=0.5 y.min=0 y.max=0

electrode name=drain x.min=2.1 y.min=0 y.max=0

electrode substrate 

doping uniform conc=4e15 p.type

doping gauss n.type conc=1e20 char=0.075 lat.char=0.05 reg=1 x.r=0.6

doping gauss n.type conc=1e20 char=0.075 lat.char=0.05 reg=1 x.l=2

#

#

contact name=gate aluminum

#

mobility rps.n rps.p mun0=5000

#

method newton trap carriers=2

#

solve init

solve vdrain=0.1

#

save outf=high.str

probe name=Eperp x=1.3 y=0.0001 dir=90 field

probe name=charge x.min=1.1 x.max=1.5 n.conc integrate y.min=0 y.max=0.2

#

log outf=highk.log

solve vstep=0.01 name=gate vfinal=2.0

#

tonyplot highk.log

tonyplot high.str

#

quit

result:-

 

DGMOSFET(double gate MOSFET)

go atlas

mesh space.mult=1.0

#

x.m l=0.00 s=0.05

x.m l=0.001 s=0.001

x.m l=0.003 s=0.0005

x.m l=0.013 s=0.0005

x.m l=0.015 s=0.001

x.m l=0.016 s=0.05

#

y.m l= 0.0 s=.005

y.m l= 0.001 s=0.0005

y.m l= 0.003 s=0.00005

y.m l= 0.007 s=0.00005

y.m l= 0.009 s=0.0005

y.m l= 0.010 s=.005

#

region num=1 x.min=0 y.min =0 mat= air

region num=2 x.min=0.0 x.max=0.003 y.min= 0.003 y.max=0.007 mat = silicon

region num=3 x.min=0.003 x.max=0.013 y.min= 0.003 y.max=0.007 mat = silicon

region num=4 x.min=0.013 x.max=0.016 y.min= 0.003 y.max=0.007 mat = silicon

region num=5 x.min=0.003 x.max=0.013 y.min= 0.001 y.max=0.003 mat = sio2

region num=6 x.min=0.003 x.max=0.013 y.min= 0.007 y.max=0.009 mat = sio2

#

electrode num=1 name= source x.min = 0 x.max=0 y.min=0.003 y.max=0.007

electrode num=2 name= drain x.min = 0.013 x.max=0.013 y.min=0.003 y.max=0.007

electrode num=3 name=gate x.min=0.003 x.max=0.013 y.min=0.0 y.max=0.001

electrode num=4 name=gate2 x.min=0.003 x.max=0.013 y.min= 0.009 y.max=0.010

#

doping uniform conc =2E20 n.type region = 2

doping uniform conc =2E20 n.type region = 4

doping uniform conc =1E18 p.type region = 3

#

#material material = sio2

material material = silicon EG300=1.08 NC300=2.8e19 NV300=1.04e19 PERMITTIVITY=11.8 MUN=2360 AFFINITY=4.284

#

model conmob srh fldmob bgn fermi print

#

method newton trap maxtrap=5

#

contact name = gate workfun = 4.6

contact name = gate2 workfun = 4.6 common = gate

contact name = source

contact name = drain

#

solve init

solve prev

solve vgate = 0.1

solve vgate = 0.2

solve vgate = 0.3

solve vgate = 0.6

solve vgate = 0.8

log outf = dgft.log

solve vdrain = 0 vstep = 0.01 vfinal = 0.7 name = drain

output band.param con.band val.band e.mobility ex.velocity ey.velocity e.velocity

tonyplot dgft.log

save outf=abc.str

tonyplot abc.str

#########################################################################################################

result:-------------------------